Browsing Titles index "Focussed helium ion channeling through Si nanomembranes"
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Focussed helium ion channeling through Si nanomembranes
(2018-03-15)Channeling of low energy (25 to 35 keV) focussed He ions transmitted through crystalline Si (001) nanomembranes (50nm) has been observed using a He ion microscope. Planar (110) and (100) channeling was detected with critical incident angles of 1.0 at ...