Focussed helium ion channeling through Si nanomembranes
Article [Accepted Manuscript]
- Faculté des arts et des sciences. Département de physique
Channeling of low energy (25 to 35 keV) focussed He ions transmitted through crystalline Si (001) nanomembranes (50nm) has been observed using a He ion microscope. Planar (110) and (100) channeling was detected with critical incident angles of 1.0 at 35 keV. Beam steering of up to 2 occurs. The technique has potential for He ion diffraction and femtometer-scale detection of inter- stitial atoms and impurities.