Browsing Faculté des arts et des sciences – Département de physique - Travaux et publications by Subject "Plasma processing"

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  • In-plasma analysis of plasma–surface interactions 

    Vinchon, Pierre; Asadollahi, Siavash; Coté, Claude; Marcet, Stephane; Atallah, S.; Dessureault, Émile; Chicoine, Martin; Sarkissian, Andranik; Leonelli, Richard; Roorda, Sjoerd; Schiettekatte, François; Stafford, Luc (American Institute of Physics, 2023)
    During deposition, modification, and etching of thin films and nanomaterials in reactive plasmas, many active species can interact with the sample simultaneously. This includes reactive neutrals formed by fragmentation of the feed gas, positive ions, ...