Vinchon, Pierre; Asadollahi, Siavash; Coté, Claude; Marcet, Stephane; Atallah, S.; Dessureault, Émile; Chicoine, Martin; Sarkissian, Andranik; Leonelli, Richard; Roorda, Sjoerd; Schiettekatte, François; Stafford, Luc (American Institute of Physics, 2023)
During deposition, modification, and etching of thin films and nanomaterials in reactive plasmas, many active species can interact with the
sample simultaneously. This includes reactive neutrals formed by fragmentation of the feed gas, positive ions, ...