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Engineering visible light emitting point defects in Zr-implanted polycrystalline AlN films
(American Institute of Physics, 2020-12-22)
We have investigated the impact of thermal annealing gaseous atmosphere of argon, nitrogen, and forming gas on the structural and optical properties of thin polycrystalline AlN films subjected to high-energy zirconium ions ...
Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors
(American Vacuum Society, 2021-06-10)
The noise caused by internal mechanical dissipation in the high refractive index amorphous
thin films in dielectric mirrors is an important limitation for gravitational wave detection. The
objective of this study is to ...
Raman-based mapping and depth-profiling of the relaxation state in amorphous silicon
(American Institute of Physics, 2024-02-09)
We show that the micro-scale variations in the relaxation state of amorphous silicon (aSi) can be well-identified by Raman mapping over hundreds or thousands of µm2 in 1-2 hours.
Pure and relaxed a-Si is obtained by ...
In-plasma analysis of plasma–surface interactions
(American Institute of Physics, 2023)
During deposition, modification, and etching of thin films and nanomaterials in reactive plasmas, many active species can interact with the
sample simultaneously. This includes reactive neutrals formed by fragmentation ...
Formation of crystalline Si1-xGex top layers by ion implantation in crystalline silicon
(Elsevier, 2023-02-27)
Semiconductor nanocrystals incorporated in a dielectric film are widely studied as potential candidates to exceed the Shockley-Queisser theoretical conversion limit of photovoltaic cells. In this context, Ge nanocrystals ...
Formation of crystalline Si1-xGex top layers by ion implantation in crystalline silicon
(Elsevier, 2023-02-27)
Semiconductor nanocrystals incorporated in a dielectric film are widely studied as potential candidates to exceed the Shockley-Queisser theoretical conversion limit of photovoltaic cells. In this context, Ge nanocrystals ...