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  • Engineering visible light emitting point defects in Zr-implanted polycrystalline AlN films 

    Aghdaei, Azin; Pandiyan, R.; Bouraoui, Ilahi; Chicoine, Martin; El Gowini, M.; Schiettekatte, François; Frechette, Luc G.; Morris, Denis (American Institute of Physics, 2020-12-22)
    We have investigated the impact of thermal annealing gaseous atmosphere of argon, nitrogen, and forming gas on the structural and optical properties of thin polycrystalline AlN films subjected to high-energy zirconium ions implantation. X-ray diffraction, ...