Étude fondamentale des mécanismes de gravure par plasma de matériaux de pointe : application à la fabrication de dispositifs photoniques
| dc.contributor.advisor | Margot, Joëlle | |
| dc.contributor.advisor | Chaker, Mohamed | |
| dc.contributor.author | Stafford, Luc | |
| dc.date.accessioned | 2017-03-15T01:26:24Z | |
| dc.date.available | 2017-03-15T01:26:24Z | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2005 | |
| dc.identifier.uri | http://hdl.handle.net/1866/17365 | |
| dc.subject | Gravure par plasma | |
| dc.subject | Pulvérisation | |
| dc.subject | Dynamique d'adsorption et de désorption | |
| dc.subject | Plasma de haute densité | |
| dc.subject | Diagnostics des plasmas | |
| dc.subject | Matériaux de pointe | |
| dc.subject | Applications photoniques | |
| dc.title | Étude fondamentale des mécanismes de gravure par plasma de matériaux de pointe : application à la fabrication de dispositifs photoniques | |
| dc.type | Thèse ou mémoire / Thesis or Dissertation | |
| etd.degree.discipline | Physique | fr |
| etd.degree.grantor | Université de Montréal | fr |
| etd.degree.level | Doctorat / Doctoral | |
| etd.degree.name | Ph. D. | |
| dcterms.description | Thèse numérisée par la Direction des bibliothèques de l'Université de Montréal. | fr |
| dcterms.language | fra |
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