Adaptation d'impédance des applicateurs de champ HF servant à l'entretien de plasmas d'onde de surface
| dc.contributor.advisor | Moisan, Michel | |
| dc.contributor.author | Fleisch, Thomas | |
| dc.date.accessioned | 2017-03-15T01:26:32Z | |
| dc.date.available | 2017-03-15T01:26:32Z | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2005 | |
| dc.identifier.uri | http://hdl.handle.net/1866/17391 | |
| dc.subject | Applicateur micro-ondes de champ HF | |
| dc.subject | Plasma d'onde de surface | |
| dc.subject | Adaptation d'impédance | |
| dc.subject | Courbe caractéristique | |
| dc.subject | Modélisation des lignes de champ électrique dans un applicateur | |
| dc.title | Adaptation d'impédance des applicateurs de champ HF servant à l'entretien de plasmas d'onde de surface | |
| dc.type | Thèse ou mémoire / Thesis or Dissertation | |
| etd.degree.discipline | Physique | fr |
| etd.degree.grantor | Université de Montréal | fr |
| etd.degree.level | Maîtrise / Master's | |
| etd.degree.name | M. Sc. | |
| dcterms.description | Mémoire numérisé par la Direction des bibliothèques de l'Université de Montréal. | fr |
| dcterms.language | fra |
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